Beilstein J. Nanotechnol.2017,8, 2106–2115, doi:10.3762/bjnano.8.210
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Keywords: cobalt nanostructures; electron holography; focused electron beam induced deposition; magneticdeposits; magnetic resonance force microscopy; Introduction
Through the local decomposition of magnetic precursor molecules by the action of an incoming electron beam, a wide range of functional
FEBID is the metal content, which is generally linked to the functionality of the deposit. In the case of magneticdeposits grown by FEBID, the metal content can be finely tuned in various ways. The beam current [7][33], the beam dwell time [30], the precursor flux [5], the beam voltage [34] and the
substrate temperature [35][36] have been found to be relevant parameters to tune the metal content in magneticdeposits. However, some constraints exist, which impede to grow arbitrary shapes with arbitrary metal content. In general, the difficulties increase when the goal is to grow very small structures
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Figure 1:
SEM micrographs showing the dimensions of the grown cobalt nanospheres. Top view and front view of ...
Beilstein J. Nanotechnol.2015,6, 1319–1331, doi:10.3762/bjnano.6.136
substrates inside an FEI Helios 600 apparatus, using Fe2(CO)9 as precursor and the scanning electron microscope (SEM) to produce magneticdeposits in a single step, as sketched in Figure 1a. The precursor is delivered to the area of interest through a single gas-injection-system (GIS) with inner diameter of
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Figure 1:
(a) A sketch of the FEBID process. (b) A SEM image of the nanowire with targeted width of 250 nm an...